APA (7th ed.) Citation

Sparks Douglas & Canal Mike Pinelis. Webinar. MEMS Vacuum Packaging.

Chicago Style (17th ed.) Citation

Sparks Douglas and Canal Mike Pinelis. Webinar. MEMS Vacuum Packaging.

MLA (9th ed.) Citation

Sparks Douglas and Canal Mike Pinelis. Webinar. MEMS Vacuum Packaging.

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