Giaccherini Andrea, Felici Roberto, Innocenti Massimo, & InTech. Operando structural characterization of the E-ALD process ultra-thin films growth.
Chicagoスタイル(17版)引用形式Giaccherini Andrea, Felici Roberto, Innocenti Massimo, , InTech. Operando Structural Characterization of the E-ALD Process Ultra-thin Films Growth.
MLA(9版)引用形式Giaccherini Andrea, et al. Operando Structural Characterization of the E-ALD Process Ultra-thin Films Growth.
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