Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS<U+0096>MEMS Technology
En esta investigacin̤ se ofrece una solucin̤ confiable para resolver el problema de no linealidad de un resonador CMOS-MEMS (semiconductor complementario de x̤ido metl̀ico-sistema microelectromecǹico) y, adems̀, se demuestra un potencial notable para construir un sensor de temperatura CMOS-MEMS par...
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| Ētahi atu kaituhi: | , |
|---|---|
| Hōputu: | Pukapuka |
| Reo: | Ingarihi |
| Ngā marau: | |
| Urunga tuihono: | Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS<U+0096>MEMS Technology |
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